FT/IR-4000/6000 series fourier transform infrared spectrometers

The Auto Y-theta stage, which can be mounted to the sample compartment of the FT/IR-4000/6000 series, enables to perform the transmittance/reflectance measurement of wafer sample up to 12 inches. This wafer measurement system is powerful tool for thickness measurement and impurity evaluation of Si wafer.

Features:

• Non-destructive and non-contact measurement by using infrared spectrometry
• High precision and reproducibility
• Various measurements are available by collaborated with optional program “Concentration quantitative program in Si”